Electronic device and module including the same

ABSTRACT

An electronic device includes an insulation material layer provided on a first main surface of a piezoelectric substrate and surrounding a functional element, and a protective layer provided on the insulation material layer. The piezoelectric substrate and the insulation material layer define a hollow portion accommodating the functional element. The protective layer includes a first portion above the hollow portion, a second portion adjacent to the first portion at one end of the second portion, and a third portion adjacent to the second portion at another end of the second portion. A distance between the first main surface and a surface of the protective layer in the thickness direction is greatest at a location where the second portion is adjacent to or in a vicinity of the first portion, and the distance is shortest at a location where the second portion is adjacent to or in a vicinity of the third portion.

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of priority to Japanese PatentApplication No. 2017-104823 filed on May 26, 2017 and is a ContinuationApplication of PCT Application No. PCT/JP2018/018080 filed on May 10,2018. The entire contents of each application are hereby incorporatedherein by reference.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to an electronic device and a moduleincluding the same.

2. Description of the Related Art

In recent years, wafer level package (hereinafter, simply referred to asWLP) electronic devices have been developed, which are element sizepackages.

For example, Japanese Patent Laid-Open No. 2006-345075 discloses asurface acoustic wave resonator device which includes interdigitatedelectrodes on a piezoelectric substrate, a gap forming layer having agap formed therein above the interdigitated electrodes, and a sealinglayer sealing the interdigitated electrodes. In Japanese PatentLaid-Open No. 2006-345075, a conductive via and an external connectionelectrode are formed so that the conductive via passes through thesealing layer and the gap forming layer and is connected to theinterdigitated electrodes; and the external connection electrodecontinues the conductive via. Then, the conductive via and the externalconnection electrode are covered with a solder resist, a portion of thesolder resist is removed, and a solder bump is thereby formed.

SUMMARY OF THE INVENTION

Preferred embodiments of the present invention provide electronicdevices and modules each including the same which can reduce degradationin characteristics of the electronic devices.

An electronic device according to a preferred embodiment of the presentinvention includes a piezoelectric substrate including a first mainsurface, a functional element provided on or above the first mainsurface, an insulation material layer provided on or above the firstmain surface and surrounding the functional element, and a protectivelayer provided on or above the insulation material layer. Thepiezoelectric substrate and the insulation material layer define ahollow portion that accommodates the functional element. In across-sectional view in a direction perpendicular to a thicknessdirection of the piezoelectric substrate, the protective layer includesa first portion, a second portion and a third portion. The first portionis above the hollow portion. The second portion is adjacent to the firstportion at one end of the second portion. The third portion is adjacentto the second portion at another end of the second portion. A distancebetween the first main surface and a surface of the protective layer inthe thickness direction is greatest at a location where the secondportion is adjacent to or in a vicinity of the first portion, and thedistance is shortest at a location where the second portion is adjacentto or in a vicinity of the third portion.

The above and other elements, features, steps, characteristics andadvantages of the present invention will become more apparent from thefollowing detailed description of the preferred embodiments withreference to the attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a surface acoustic wave filteraccording to a first preferred embodiment of the present invention.

FIG. 2 is a cross-sectional view of a surface acoustic wave filteraccording to a Comparative Example.

FIG. 3 is a diagram showing how the surface acoustic wave filteraccording to the Comparative Example is flip-chip mounted on a circuitboard.

FIG. 4 is a diagram showing how the surface acoustic wave filteraccording to the first preferred embodiment of the present invention isflip-chip mounted on a circuit board.

FIGS. 5A and 5B are cross-sectional views of the surface acoustic wavefilter according to the first preferred embodiment of the presentinvention.

FIG. 6 is a cross-sectional view of a surface acoustic wave filteraccording to a variation of the first preferred embodiment of thepresent invention.

FIG. 7 is a cross-sectional view of a surface acoustic wave filteraccording to a second preferred embodiment of the present invention.

FIG. 8 is a cross-sectional view of a surface acoustic wave filteraccording to a third preferred embodiment of the present invention.

FIG. 9 is a cross-sectional view of a surface acoustic wave filteraccording to a fourth preferred embodiment of the present invention.

FIG. 10 is a cross-sectional view of a surface acoustic wave filteraccording to a variation of the fourth preferred embodiment of thepresent invention.

FIG. 11 is a cross-sectional view of a surface acoustic wave filteraccording to a fifth preferred embodiment of the present invention.

FIG. 12 is a cross-sectional view of a surface acoustic wave filteraccording to the fifth preferred embodiment of the present invention.

FIG. 13 is a cross-sectional view of a surface acoustic wave filteraccording to a sixth preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, preferred embodiments according to the present inventionwill be described with reference to the accompanying drawings. Note thatthe same reference signs are used to refer to the same or correspondingportions in the drawings, and description thereof will not be repeated.

Note that when the preferred embodiments described below refer to anumber, a quantity, etc., the scope of the present invention is notalways limited to that number, that quantity, etc., unless otherwisespecified. In the following preferred embodiments, each device is alsonot essential to the present invention unless otherwise specified.

First Preferred Embodiment

An electronic device 100 according to a first preferred embodiment isapplied to, for example, an RF circuit included in a communicationdevice, such as a mobile phone. Electronic device 100 operates throughsound waves. Examples of electronic device 100 include surface acousticwave (SAW) devices, bulk acoustic wave (BAW) devices, and MEMS devices.In the first preferred embodiment, a surface acoustic wave filter willbe shown and described as one preferred embodiment of electronic device100. In the following, electronic device 100 will be also referred to asa “surface acoustic wave filter 100”.

FIG. 1 is a cross-sectional view of surface acoustic wave filter 100according to the first preferred embodiment of the present invention.Surface acoustic wave filter 100 is preferably, for example, a ladderfilter in which multiple surface acoustic wave resonators are connectedin a ladder arrangement. The surface acoustic wave resonator correspondsto one preferred embodiment of “the functional element”.

Referring to FIG. 1 , surface acoustic wave filter 100 according to thefirst preferred embodiment includes a piezoelectric substrate 1, asurface acoustic wave resonator 2 (the functional element), a line 3, asupport layer 4, a cover layer 5, a connection electrode 6, a lineelectrode 7, a pillar 8, an external connection terminal 9, and aprotective layer 10.

Piezoelectric substrate 1 is preferably made of piezoelectric crystal,for example, lithium tantalate (LiTaO₃) or lithium niobate (LiNbO₃).Piezoelectric substrate 1 may be made of piezo ceramic or may be asubstrate including a piezoelectric thin film on the primary surface.Piezoelectric substrate 1 has a cuboid shape, for example, andpreferably has a rectangular or substantially rectangular shape in planview in the thickness direction of piezoelectric substrate 1.Piezoelectric substrate 1 includes a primary surface 1 a.

Surface acoustic wave resonator 2 and line 3 are provided on primarysurface 1 a of piezoelectric substrate 1. Surface acoustic waveresonator 2 includes a conductor layer provided on primary surface 1 a,and includes a pair of interdigitated electrodes (hereinafter, alsoreferred to as an “inter digital transducer (IDT) electrode”), theconductor layer preferably including aluminum (Al), copper (Cu), nickel(Ni), gold (Au), or platinum (Pt), for example. Surface acoustic waveresonator 2 may further include two reflectors provided on both sides ofthe IDT electrodes in a direction of propagation of a surface acousticwave.

Multiple surface acoustic wave resonators 2 define a ladder filter. Thesize of each surface acoustic wave resonator is determined according topredetermined filtering characteristics of the ladder filter. Featuresof surface acoustic wave resonator 2 are the same as or similar to thoseof general surface acoustic wave resonators, and thus descriptionthereof will be omitted.

Line 3 includes a conductor layer preferably including, for example, Al,Cu, Ni, Au, or Pt, which is provided on primary surface 1 a. At leastone end of line 3 is connected to one of the interdigitated electrodesof surface acoustic wave resonator 2. Line 3 may be defined by multipleconductor layers.

Cover layer 5 is provided on support layer 4 described below, and facesprimary surface 1 a of piezoelectric substrate 1. Cover layer 5preferably has a rectangular or substantially rectangular shape that isthe same or substantially the same as primary surface 1 a. Cover layer 5includes an insulating material. For example, a resin such as epoxy orpolyimide, or an insulating ceramic such as silicon oxide (SiO₂) orAl₂O₃ may preferably be used. Cover layer 5 may include multiple layers.

Support layer 4 is provided between piezoelectric substrate 1 and coverlayer 5, and defines a hollow portion 11 that accommodates surfaceacoustic wave resonator 2, between piezoelectric substrate 1 and coverlayer 5. Specifically, in order to provide hollow portion 11, supportlayer 4 that surrounds a region in which surface acoustic wave resonator2 is provided on primary surface 1 a.

As shown in FIG. 1 , a portion of support layer 4 is located on theouter periphery of piezoelectric substrate 1. Due to the portion ofsupport layer 4, hollow portion 11 is provided within the outerperiphery of piezoelectric substrate 1. In the following description,the portion of support layer 4 that is located on the outer periphery ofpiezoelectric substrate 1 will be also referred to as “support layer 4”.

Support layer 4 is preferably made of an insulating material, and, forexample, a resin or an insulating ceramic can be used. Support layer 4is preferably made of an insulating material (e.g., polyimide) that hasexcellent water resistance to prevent ingress of water into surfaceacoustic wave filter 100. Support layer 4 and cover layer 5 form aninsulation material layer.

Line electrode 7 is provided on a second surface of cover layer 5 whichis a surface opposite a first surface facing piezoelectric substrate 1.Line electrode 7 is connected to surface acoustic wave resonator 2 by apenetrating electrode not shown. Line electrode 7 defines a linepattern, for example, an inductor.

Connection electrode 6 is provided on the second surface of cover layer5, extends to piezoelectric substrate 1 along side surfaces of coverlayer 5 and side surfaces of support layer 4, and is connected to line 3provided on piezoelectric substrate 1.

Protective layer 10, sealing support layer 4, cover layer 5, connectionelectrode 6, and line electrode 7 are provided on primary surface 1 a ofpiezoelectric substrate 1. Protective layer 10 preferably has arectangular or substantially rectangular shape that is the same orsubstantially the same as primary surface 1 a. Protective layer 10 ispreferably made of an insulating material, and, for example, a resinsuch as epoxy or polyimide, or an insulating ceramic such as siliconoxide (SiO₂) or Al₂O₃ can be used. Protective layer 10 may be made ofthe same or similar material as cover layer 5.

External connection terminal 9 is provided on protective layer 10.External connection terminal 9 is preferably, for example, a flat pad.The pad is a thin film preferably including an electrically conductivematerial, for example, Ti, Cu, Ni, or Au, etc. The pad may includemultiple thin films. External connection terminal 9 overlaps with atleast a portion of connection electrode 6 and a portion of lineelectrode 7 in plan view.

When mounting surface acoustic wave filter 100 onto a circuit board,external connection terminal 9 is connected to a line provided on thecircuit board. External connection terminal 9 may be a bump. The bump isa metal bump, for example, a solder bump or an Au bump. Note that evenwhen the external connection terminal is a bump, the bump overlaps withat least a portion of connection electrode 6 and a portion of lineelectrode 7 in plan view.

As shown in FIG. 1 , pillar 8 extends through protective layer 10 in thethickness direction. One end portion of pillar 8 in the thicknessdirection of protective layer 10 is connected to external connectionterminal 9, and the other end portion of pillar is connected toconnection electrode 6 or line electrode 7. Pillar 8 is preferably madeof a conductive material, for example, Ti or Cu. Pillar 8 may be formedof the same or similar conductive material as connection electrode 6,line electrode 7, and external connection terminal 9, or formed of anyother conductive material.

Pillar 8 electrically connects external connection terminal 9,connection electrode 6, and line electrode 7. Pillar overlaps withexternal connection terminal 9, connection electrode 6, and lineelectrode 7 in plan as viewed in the thickness direction of protectivelayer 10.

Surface acoustic wave filter 100 shown in FIG. 1 is mounted on a circuitboard while external connection terminal 9 is abutting a line providedon the circuit board. In other words, surface acoustic wave filter 100is flip-chip mounted on the circuit board. Surface acoustic wave filter100 and the circuit board define a “module” according to the presentinvention. In the first preferred embodiment, the module is preferably aWLP surface acoustic wave filter.

In surface acoustic wave filter 100, protective layer 10 includes afirst portion 10 a located above the hollow portion 11 (corresponding to“region I” in the figure) and a second portion 10 b located above thesupport layer 4 (corresponding to “region II” in the figure). In otherwords, second portion 10 b of protective layer 10 is located on theouter periphery of piezoelectric substrate 1.

Where d2 is a distance, in second portion 10 b of protective layer 10,between the surface (primary surface 1 a) of piezoelectric substrateland the surface of protective layer 10 in the thickness direction ofpiezoelectric substrate 1, second portion 10 b is disposed so thatdistance d2 is greatest at a location where second portion 10 b isadjacent to or in a vicinity of first portion 10 a, and distance d2 isshortest at a location where second portion 10 b is adjacent to or in avicinity of an end portion of piezoelectric substrate 1 in the widthdirection of piezoelectric substrate 1.

In surface acoustic wave filter 100 shown in FIG. 1 , distance d2decreases toward the end portions of piezoelectric substrate 1 in thewidth direction of piezoelectric substrate 1. In other words, thesurface of second portion 10 b is inclined from primary surface 1 a ofpiezoelectric substrate 1 so that distance d2 is maximum at a locationwhere second portion 10 b is adjacent to or in a vicinity of region Iand distance d2 is minimum at a location where second portion 10 b isfurthest away from region I.

Protective layer 10 further includes a curved surface in an end portion10 c in the width direction of piezoelectric substrate 1, the curvedsurface being convex in the opposite direction from the piezoelectricsubstrate 1. Accordingly, the end portions of the surface of protectivelayer 10 are not sharply squared.

Moreover, where d1 is a distance in first portion 10 a of protectivelayer 10, between the surface (primary surface 1 a) of piezo electricsubstrate 1 and the surface of protective layer 10 in the thicknessdirection of piezoelectric substrate 1, the maximum value of distance d1is greater than the maximum value of distance d2. According to this, thesurface of first portion 10 a is inclined from primary surface 1 a ofpiezoelectric substrate 1.

More preferably, the surface of first portion 10 a of protective layer10 is convexly curved in the opposite direction from the piezoelectricsubstrate 1. According to this, the entirety or substantially theentirety of protective layer 10, including first portion 10 a and secondportion 10 b, has a curved surface that is convex outwardly.

Next, a problem with a Comparative Example and advantageous effects ofsurface acoustic wave filter 100 according to the first preferredembodiment will be described, with reference to Comparative Example ofthe first preferred embodiment shown in FIGS. 2 and 3 .

FIG. 2 is a cross-sectional view of surface acoustic wave filter 200according to Comparative Example, which is compared to FIG. 1 .

Referring to FIG. 2 , a surface acoustic wave filter 200 according toComparative Example has similar features as surface acoustic wave filter100 according to the first preferred embodiment shown in FIG. 1 , exceptthat surface acoustic wave filter 200 according to Comparative Exampleincludes a protective layer 12, instead of protective layer 10 includedin surface acoustic wave filter 100.

Specifically, in surface acoustic wave filter 200, protective layer 12includes a first portion 12 a located above a hollow portion 11 (aregion I), and a second portion 12 b located above a support layer 4 (aregion II). In other words, second portion 12 b of protective layer 12is located on the outer periphery of piezoelectric substrate 1.

In second portion 12 b, distance d2 between the surface (primary surface1 a) of piezoelectric substrate 1 and the surface of protective layer 12in the thickness direction of piezoelectric substrate 1 is constant orsubstantially constant in the width direction of piezoelectric substrate1. Stated differently, the surface of second portion 12 b is in parallelwith or substantially in parallel with primary surface 1 a ofpiezoelectric substrate 1. For this reason, the surfaces of the endportions of protective layer 12 in the width direction of piezoelectricsubstrate 1 have square or substantially square shapes.

Moreover, in first portion 12 a of protective layer 12, distance d1between the surface (primary surface 1 a) of piezoelectric substrate 1and a surface of protective layer 12 in the thickness direction ofpiezoelectric substrate 1 is constant or substantially constant in thewidth direction of piezoelectric substrate 1. Stated differently, thesurface of first portion 12 a is in parallel with or substantially inparallel with primary surface 1 a of piezoelectric substrate 1. In otherwords, in the entirely of protective layer 12, the distance between thesurface (primary surface 1 a) of piezoelectric substrate 1 and thesurface of protective layer 12 in the thickness direction of piezoelectric substrate 1 is constant or substantially constant in the widthdirection of piezoelectric substrate 1.

Surface acoustic wave filter 200 according to Comparative Example isflip-chip mounted on a circuit board 300, as shown in FIG. 3 . Inflip-chip mounting, surface acoustic wave filter 200 is picked up bysuction of the rear surface of surface acoustic wave filter 200(corresponding to the primary surface of piezoelectric substrate 1opposite the primary surface 1 a) by a mounter nozzle 350, and surfaceacoustic wave filter 200 is transferred over the circuit board 300.Surface acoustic wave filter 200 is then placed down onto circuit board300, bringing external connection terminal 9 into contact with circuitboard 300, thus mounting surface acoustic wave filter 200 in apredetermined location on circuit board 300.

Here, when bringing surface acoustic wave filter 200 into contact withcircuit board 300, a stress F1 is applied to circuit board 300downwardly in the thickness direction of surface acoustic wave filter200. Surface acoustic wave filter 200 is subjected to a stress F2 as areaction force against stress F1.

At this time, circuit board 300 may be inclined from primary surface 1 aof piezoelectric substrate 1. If surface acoustic wave filter 200 ismounted on circuit board 300 while circuit board 300 is inclined, theend portion of a surface of protective layer 12 in the width directionthereof may come into contact with circuit board 300, as shown in FIG. 3. For this reason, stress F2 is applied by circuit board 300 to the endportion of the surface of protective layer 12.

In Comparative Example, since the end portions of the surface ofprotective layer 12 are square or substantially square, and thus stressF2 is concentrated onto the end portions. Thus, Comparative Example hasthe potential of causing damage to protective layer 12 at the endportions, for example, cracks and chips. As a portion of protectivelayer 12 is damaged, water or gas may enter protective layer 12 throughthe damaged portion, and connection electrode 6 and line electrode 7,etc., may be subjected to oxidation and corrosion. As a result, there isa concern that this may lead to degradation in filter characteristics ofsurface acoustic wave filter 200.

Moreover, in Comparative Example, circuit board 300 is required to havehigh coplanarity in order to prevent the damage to protective layer 12,which complicates the mount process.

FIG. 4 shows how surface acoustic wave filter 100 according to the firstpreferred embodiment is flip-chip mounted onto circuit board 300. InFIG. 4 , circuit board 300 is inclined, as with FIG. 3 . For thisreason, an end portion of the surface of protective layer 10 comes intocontact with circuit board 300.

In surface acoustic wave filter 100 according to the first preferredembodiment, the surface of second portion 10 b is inclined from primarysurface 1 a of piezoelectric substrate 1 so that distance d2 is greatestat a location where second portion 10 b is adjacent to or in a vicinityof region I and distance d2 is shortest at a location where secondportion 10 b is farthest away from region I. Furthermore, the surface ofend portion 10 c of protective layer 10 is convexly curved in theopposite direction from piezoelectric substrate 1, that is, end portion10 c is not sharply squared. For this reason, stress F3 by circuit board300 is distributed and act on protective layer 10. Accordingly, thepotential of damaging the end portion of protective layer 10 can bereduced. For this reason, oxidation and corrosion of connectionelectrode 6 and line electrode 7 resulting from the damage to protectivelayer 10 can be reduced, and, consequently, degradation in the filtercharacteristics can be reduced.

Moreover, since circuit board 300 is not required to have highcoplanarity for mounting surface acoustic wave filter 100 onto circuitboard 300, the mounting process is not complicated.

Note that while the first preferred embodiment has been described withreference to distance d2 in second portion 10 b of protective layer 10reducing toward the end portion of piezoelectric substrate 1 in thewidth direction of piezoelectric substrate 1, the present application isnot limited to the above configuration, insofar as distance d2 isgreatest at the location where second portion 10 b is adjacent to or ina vicinity of first portion 10 a and distance d2 is shortest at thelocation where second portion 10 b is adjacent to or in a vicinity ofthe end portion of piezoelectric substrate 1 in the width direction ofpiezoelectric substrate 1, as described above. Accordingly, surfaceacoustic wave filter 100 according to the present invention alsoincludes an implementation in which, for example, protective layer 10has a surface that recedes into piezoelectric substrate 1 between theend portion of piezoelectric substrate 1 in the width direction ofpiezoelectric substrate 1 and the location where second portion 10 b isadjacent or in a vicinity of to first portion 10 a.

Furthermore, in surface acoustic wave filter 100 according to the firstpreferred embodiment, the following conditions are met for the shape ofprotective layer 10.

FIGS. 5A and 5B are cross-sectional views of surface acoustic wavefilter 100 according to the first preferred embodiment. For ease ofdescription, FIGS. 5A and 5B show only piezoelectric substrate 1,support layer 4, cover layer 5, and protective layer 10 of surfaceacoustic wave filter 100.

FIG. 5A is a cross-sectional view of surface acoustic wave filter 100with no external stress applied to protective layer 10. FIG. 5B isacross-sectional view of surface acoustic wave filter 100 with externalstress applied to protective layer 10.

As described with reference to FIG. 1 , the entirety of protective layer10, including first portion 10 a and second portion 10 b, has a curvedsurface that is convex outwardly. In FIG. 5A, the distance between thesurface of cover layer 5 and the surface of protective layer 10 in thethickness direction of piezoelectric substrate 1 is defined as a“thickness of protective layer 10.” The thickness of protective layer 10reduces from the center region of first portion 10 a toward secondportion 10 b.

In FIG. 5A, t1 denotes the maximum thickness in first portion 10 a (themaximum distance in first portion 10 a, between the surface of coverlayer 5 and the surface of protective layer 10 in the thicknessdirection of piezoelectric substrate 1), and t2 denotes the maximumthickness in second portion 10 b (the maximum distance in second portion10 b, between the surface of cover layer 5 and the surface of protectivelayer 10 in the thickness direction of piezoelectric substrate 1).Moreover, X denotes the minimum distance in hollow portion 11, betweenthe surface of cover layer 5 facing hollow portion 11 (a surfaceopposite the surface facing protective layer 10) and the surfaces ofsurface acoustic wave resonator 2 and line 3, in the thickness directionof piezoelectric substrate 1.

Here, when mounting surface acoustic wave filter 100 onto circuit board300, surface acoustic wave filter 100 is pushed against circuit board300. Thus, protective layer 10 receives a pressure from circuit board300 in the thickness direction, as a reaction force.

At this time, upon receipt of the pressure from circuit board 300,protective layer 10 is pushed, preferentially, from the central regionof first portion 10 a. Initially, the contact area between circuit board300 and the surface of protective layer 10 is small, and deformation ofprotective layer 10 is also small. However, as the pressure increases,protective layer 10 is further deformed, increasing the contact areabetween circuit board 300 and the surface of protective layer 10.

At this time, the rear surface of protective layer 10 deforms convexlyin the direction to piezoelectric substrate 1. As the rear surface ofprotective layer 10 deforms, cover layer 5 deforms convexly in thedirection to piezoelectric substrate 1.

Thereafter, as the protective layer 10 deforms to the border betweenfirst portion 10 a and second portion 10 b, protective layer 10 becomesless likely to deform, as shown in FIG. 5B. This is because the endportions of protective layer 10 in the thickness direction are supportedby support layer 4, and the rigidity of protective layer 10 is increasedby a compressive stress caused in protective layer 10.

In FIG. 5B, the upper limit of the distance between the highest pointand the lowest point of the convexly curved rear surface of cover layer5 in the thickness direction thereof can be represented as a difference(t1−t2) between the maximum thickness t1 of first portion 10 a andmaximum thickness t2 of second portion 10 b.

Note that the highest point refers to a region of the convex rearsurface of cover layer 5 that is closest to piezoelectric substrate 1(e.g., the central region of the convexly curved rear surface). Thelowest point refers to a region of the convex rear surface of coverlayer 5 that is farthest away from piezoelectric substrate 1 (e.g., endregions of the convexly curved rear surface).

Here, in surface acoustic wave filter 100, maximum thickness t1 of firstportion 10 a, maximum thickness t2 of second portion 10 b, and minimumdistance X of hollow portion 11 satisfy the relational expressionexpressed as (t1−t2)<X.

In this way, a gap is provided between the rear surface of cover layer 5and the surface of surface acoustic wave resonator 2 or line 3 even ifprotective layer 10 is deformed farthest. This can prevent the rearsurface of cover layer 5 from contacting with surface acoustic waveresonator 2 or line 3, and thus prevent damage to surface acoustic waveresonator 2 and line 3. Accordingly, the deterioration can be reduced inthe filter characteristics of surface acoustic wave filter 100.

Note that line electrode 7 is provided between first portion 10 a ofprotective layer 10 and cover layer 5, as shown in FIG. 1 . This allowsprotective layer 10 to have increased rigidly against the pressure fromcircuit board 300.

Variation of First Preferred Embodiment

Next, referring to FIG. 6 , surface acoustic wave filter 100 accordingto a variation of the first preferred embodiment will be described.

As shown in FIG. 6 , surface acoustic wave filter 100 according to thevariation has similar features as surface acoustic wave filter 100 shownin FIG. 1 , except that surface acoustic wave filter 100 according tothe variation includes a penetrating electrode 6A, instead of connectionelectrode 6.

In surface acoustic wave filter 100 according to the present variation,penetrating electrode 6A is provided through cover layer 5 and supportlayer 4. Penetrating electrode 6A and pillar 8 electrically connectexternal connection terminal 9 and line 3 which are respectivelyprovided on protective layer 10 and piezoelectric substrate 1.

Even though line 3 and external connection terminal 9 are electricallyconnected using penetrating electrode 6A as in the present variation,the surface of second portion 10 b of protective layer 10 is inclinedfrom primary surface 1 a of piezoelectric substrate 1 so that distanced2 is greatest at a location where second portion 10 b is adjacent to orin a vicinity of region I and distance d2 is shortest at a locationwhere second portion 10 b is farthest away from region I, similarly tothe first preferred embodiment described above. Furthermore, end portion10 c of protective layer 10 has a curved surface that is convex in theopposite direction from piezoelectric substrate 1. Due to this, thepotential of damaging protective layer 10 can be reduced. Accordingly,oxidation and corrosion of an external connection line resulting fromthe damage to protective layer 10 can be reduced, and, consequently,degradation in the filter characteristics can be reduced.

Second Preferred Embodiment

Referring to FIG. 7 , an electronic device 100 according to a secondpreferred embodiment of the present invention will be described.

Referring to FIG. 7 , a surface acoustic wave filter 100 according tothe second preferred embodiment has similar features as surface acousticwave filter 100 shown in FIG. 1 , except for the features of aprotective layer 10.

Protective layer 10 of surface acoustic wave filter 100 shown in FIG. 7has a first portion 10 a having a flat surface. Note that first portion10 a including a flat surface includes distance d1, in first portion 10a, between the surface (primary surface 1 a) of a piezoelectricsubstrate 1 and a surface of protective layer 10 in the thicknessdirection of piezoelectric substrate 1, as being not only constant, butalso substantially constant in the width direction of piezoelectricsubstrate 1. Distance d1 as being substantially constant in the widthdirection of piezoelectric substrate 1 means that distance d1 varieswithin an extent of error (e.g., within plus or minus 10%).

The surface of second portion 10 b of protective layer 10 in surfaceacoustic wave filter 100 according to the second preferred embodiment isalso inclined from primary surface 1 a of piezoelectric substrate 1 sothat distance d2 is maximum at a location where second portion 10 b isadjacent to or in a vicinity of region I and distance d2 is minimum at alocation where second portion 10 b is farthest away from region I.Furthermore, end portion 10 c of protective layer 10 has a curvedsurface that is convex in the opposite direction from piezoelectricsubstrate 1. Accordingly, similarly to surface acoustic wave filter 100according to the first preferred embodiment, the potential of damagingprotective layer 10 can be reduced. Accordingly, oxidation and corrosionof a connection electrode 6 and a line electrode 7 resulting from thedamage to protective layer 10 can be reduced, and, consequently,degradation in the filter characteristics can be reduced.

Third Preferred Embodiment

Referring to FIG. 8 , an electronic device 100 according to a thirdpreferred embodiment of the present invention will be described.

Referring to FIG. 8 , electronic device 100 according to the thirdpreferred embodiment basically has similar features as surface acousticwave filter 100 shown in FIG. 1 , except for the features of a coverlayer 5.

In surface acoustic wave filter 100 shown in FIG. 8 , cover layer 5includes a curved portion that is convex in the opposite direction froma piezoelectric substrate 1.

While FIG. 8 shows cover layer 5 as having a single curved portion, itshould be noted that cover layer 5 may have multiple curved portions.For example, in an implementation in which a support layer 4 is providedin a hollow portion 11, cover layer 5 is divided into two portions atthe connection between support layer 4 and cover layer 5, one portionbeing on one side in the width direction, the other portion being on theother side in the width direction, each of which portions is curvedconvexly in the opposite direction from piezoelectric substrate 1.

Surface acoustic wave filter 100 according to the third preferredembodiment includes a second portion 10 b of a protective layer 10 whichhas the same or similar features as that of surface acoustic wave filter100 according to the first preferred embodiment. Accordingly, surfaceacoustic wave filter 100 according to the third preferred embodiment canprovide the same or similar advantageous effects as those of surfaceacoustic wave filter 100 according to the first preferred embodiment.

Fourth Preferred Embodiment

Referring to FIGS. 9 and 10 , an electronic device 100 according to afourth preferred embodiment of the present invention will be described.

Referring to FIG. 9 , a surface acoustic wave filter 100 according tothe fourth preferred embodiment has similar features as surface acousticwave filter 100 shown in FIG. 1 , except for the features of aprotective layer 10.

In surface acoustic wave filter 100 shown in FIG. 9 , protective layer10 includes a first curved portion 10 d at an end portion ofpiezoelectric substrate 1 in the width direction, and a second curvedportion 10 e between first curved portion 10 d and an end surface ofpiezoelectric substrate 1 in the width direction. First curved portion10 d is convex in the opposite direction from piezoelectric substrate 1.In contrast, second curved portion 10 e is concave in the direction topiezoelectric substrate 1.

Compared to surface acoustic wave filter 100 shown in FIG. 1 , surfaceacoustic wave filter 100 according to the fourth preferred embodimenthas an increased bond area between protective layer 10 and primarysurface 1 a of piezoelectric substrate 1, due to second curved portion10 e. However, since the thickness of second curved portion 10 edecreases toward the end portion of piezoelectric substrate 1,protective layer 10, which covers the end portion of piezoelectricsubstrate 1 in the width direction, is moderated from significantlyincreasing in volume that is due to the provision of second curvedportion 10 e.

According to surface acoustic wave filter 100 of the fourth preferredembodiment, the bond area between primary surface 1 a and protectivelayer 10 at the end portion of piezoelectric substrate 1 in the widthdirection can be increased while preventing an increase in volume ofprotective layer 10. An increase in the bond area between primarysurface 1 a and protective layer 10 increases the bonding strength, thuspreventing protective layer 10 from being de bonded from primary surface1 a when the end portion of the surface of protective layer 10 in thewidth direction comes into contact with the circuit board 300.

FIG. 10 shows a variation of surface acoustic wave filter 100 accordingto the fourth preferred embodiment. Also in the present variation,protective layer 10 includes a first curved portion 10 d at an endportion of piezoelectric substrate 1 in the width direction, and asecond curved portion 10 e between first curved portion 10 d and an endsurface of piezoelectric substrate 1 in the width direction. Thus, thepresent variation of surface acoustic wave filter 100 according to thefourth preferred embodiment can provide the same or similar advantageouseffects as those of surface acoustic wave filter 100 shown in FIG. 9 .

Fifth Preferred Embodiment

Referring to FIGS. 11 and 12 , an electronic device 100 according to afifth preferred embodiment will be described.

Referring to FIG. 11 , a surface acoustic wave filter 100 according tothe fifth preferred embodiment has similar features as surface acousticwave filter 100 according to the variation of the first preferredembodiment shown in FIG. 6 , except for the features of a support layer4 and a protective layer 10.

In surface acoustic wave filter 100 shown in FIG. 11 , a penetratingelectrode 6A is provided through a cover layer 5 and a support layer 4.An end surface of support layer 4 in the width direction is locatedoutward of the end surface of protective layer 10 in the width direction(on the end surface side of piezoelectric substrate 1 in the widthdirection). Note that the end surface of protective layer 10 in thewidth direction is located outward of the end surface of cover layer 5in the width direction.

Compared to surface acoustic wave filter 100 shown in FIG. 6 , surfaceacoustic wave filter 100 according to the fifth preferred embodimentincludes end portion 10 c of protective layer 10 in the width directionlocated farther away from the end surface of piezoelectric substrate 1in the width direction. Thus, when mounting surface acoustic wave filter100 onto circuit board 300 (see FIG. 4 ), the potential of the surfaceof end portion 10 c of protective layer 10 coming into contact withcircuit board 300, can be reduced. Accordingly, the potential ofdamaging protective layer 10 can further be reduced.

FIG. 12 is a diagram showing a variation of surface acoustic wave filter100 according to the fifth preferred embodiment. Also in the presentvariation, the end surface of support layer 4 in the width direction islocated outward of the end surface of protective layer 10 in the widthdirection. Note that FIG. 12 shows the end surface of cover layer 5 inthe width direction that is located outward of the end surface ofprotective layer 10 in the width direction. The variation can also yieldthe same or similar advantageous effects as those of surface acousticwave filter 100 shown in FIG. 11 .

Sixth Preferred Embodiment

Referring to FIG. 13 , an electronic device 100 according to a sixthpreferred embodiment of the present invention will be described.

Referring to FIG. 13 , a surface acoustic wave filter 100 according tothe sixth preferred embodiment has similar features as surface acousticwave filter 100 shown in FIG. 1 , except for the features of aprotective layer 10.

In surface acoustic wave filter 100 shown in FIG. 13 , end portion 10 cof protective layer 10 does not have a curved surface that is convex inthe opposite direction from piezoelectric substrate 1. However, thesurface of second portion 10 b of protective layer 10 in surfaceacoustic wave filter 100 according to the sixth preferred embodiment isalso inclined from primary surface 1 a of piezoelectric substrate 1 sothat distance d2 is maximum at a location where second portion 10 b isadjacent to or in a vicinity of region I and distance d2 is minimum at alocation where second portion 10 b is farthest away from region I.Accordingly, similarly to surface acoustic wave filter 100 according tothe first preferred embodiment, the potential of damaging protectivelayer 10 can be reduced. Accordingly, oxidation and corrosion of aconnection electrode 6 and a line electrode 7 resulting from the damageto protective layer 10 can be reduced, and, consequently, degradation inthe filter characteristics can be reduced.

The presently disclosed embodiments should be considered in all aspectsas illustrative and not restrictive. The scope of the present inventionis defined by the appended claims, rather than by the description above.All changes which come within the meaning and range of equivalency ofthe appended claims are to be embraced within their scope.

While preferred embodiments of the present invention have been describedabove, it is to be understood that variations and modifications will beapparent to those skilled in the art without departing from the scopeand spirit of the present invention. The scope of the present invention,therefore, is to be determined solely by the following claims.

1. An electronic device, comprising: a piezoelectric substrate includinga first main surface; a functional element provided on or above thefirst main surface; an insulation material layer provided on or abovethe first main surface and surrounding the functional element; and aprotective layer provided on or above the insulation material layer;wherein the piezoelectric substrate and the insulation material layerdefine a hollow portion that accommodates the functional element; in across-sectional view in a direction perpendicular to a thicknessdirection of the piezoelectric substrate, the protective layer includes:a first portion above the hollow portion; a second portion adjacent tothe first portion at one end of the second portion; and a third portionadjacent to the second portion at another end of the second portion; adirection parallel to the first main surface is a first direction in thecross-sectional view in the direction perpendicular to the thicknessdirection of the piezoelectric substrate; and a maximum distance in thefirst direction between one end portion and another end portion of theprotective layer is less than a maximum distance in the first directionbetween one end portion and another end portion of the piezoelectricsubstrate.
 2. The electronic device according to claim 1, wherein theinsulation material layer includes a fourth portion and a fifth portion,the fourth portion facing the piezoelectric substrate with the hollowportion interposed between the fourth portion and the piezoelectricsubstrate, and the fifth portion supporting the fourth portion.
 3. Theelectronic device according to claim 2, wherein the second portion is onor above the fifth portion.
 4. The electronic device according to claim3, wherein a direction extending from the first main surface in thethickness direction of the piezoelectric substrate is a seconddirection; at an end portion of the third portion in the firstdirection, a closest location of the protective layer to thepiezoelectric substrate is a first location and a location separatedfrom the first location in the second direction is a second location;and a thickness of the protective layer between the first location andthe second location decreases toward the end portion of thepiezoelectric substrate.
 5. The electronic device according to claim 4,wherein a location of the protective layer further separated from thesecond location in the second direction is a third location; an endportion of the second location in the first direction is located inwardsof an end portion of the first location in the first direction; and anend portion of the third location in the first direction is locatedoutwards of the end portion of the second location in the firstdirection.
 6. The electronic device according to claim 5, furthercomprising: a line provided on the piezoelectric substrate and connectedto the functional element; wherein a connection electrode is connectedto the line.
 7. The electronic device according to claim 5, wherein theinsulation material layer is made of polyimide.
 8. The electronic deviceaccording to claim 5, further comprising a line electrode providedbetween the first portion of the protective layer and the insulationmaterial layer, the line electrode functioning as an inductor.
 9. Theelectronic device according to claim 5, further comprising: apenetrating electrode connected to a connection electrode, thepenetrating electrode penetrating the first portion; and an externalconnection terminal connected to the penetrating electrode; wherein theconnection electrode, the penetrating electrode, and the externalconnection terminal include the same electrically conducting material.10. A module, comprising: a circuit board including a line provided atleast on a surface of the circuit board; and the electronic deviceaccording to claim 5; wherein the electronic device is flip-chip mountedon the circuit board.
 11. An electronic device, comprising: apiezoelectric substrate including a first main surface; a functionalelement provided on or above the first main surface; an insulationmaterial layer provided on or above the first main surface andsurrounding the functional element; and a protective layer provided onor above the insulation material layer; wherein the piezoelectricsubstrate and the insulation material layer define a hollow portion thataccommodates the functional element; in a cross-sectional view in adirection perpendicular to a thickness direction of the piezoelectricsubstrate, the protective layer includes: a first portion above thehollow portion; a second portion adjacent to the first portion at oneend of the second portion; and a third portion adjacent to the secondportion at another end of the second portion; a direction parallel tothe first main surface is a first direction in the cross-sectional viewin the direction perpendicular to the thickness direction of thepiezoelectric substrate; and an end portion of the piezoelectricsubstrate in the first direction is located outwards of an end portionof the protective layer in the first direction.
 12. The electronicdevice according to claim 11, wherein the insulation material layerincludes a fourth portion and a fifth portion, the fourth portion facingthe piezoelectric substrate with the hollow portion interposed betweenthe fourth portion and the piezoelectric substrate, and the fifthportion supporting the fourth portion.
 13. The electronic deviceaccording to claim 12, wherein the second portion is on or above thefifth portion.
 14. The electronic device according to claim 13, whereina direction extending from the first main surface in the thicknessdirection of the piezoelectric substrate is a second direction; at anend portion of the third portion in the first direction, a closestlocation of the protective layer to the piezoelectric substrate is afirst location and a location separated from the first location in thesecond direction is a second location; and a thickness of the protectivelayer between the first location and the second location decreasestoward the end portion of the piezoelectric substrate.
 15. Theelectronic device according to claim 14, wherein a location of theprotective layer further separated from the second location in thesecond direction is a third location; an end portion of the secondlocation in the first direction is located inwards of an end portion ofthe first location in the first direction; and an end portion of thethird location in the first direction is located outwards of the endportion of the second location in the first direction.
 16. An electronicdevice, comprising: a piezoelectric substrate including a first mainsurface; a functional element provided on or above the first mainsurface; an insulation material layer provided on or above the firstmain surface and surrounding the functional element; a protective layerprovided on or above the insulation material layer; a connectionelectrode provided between the insulation material layer and theprotective layer, the connection electrode extending to thepiezoelectric substrate along a side surface of the insulation materiallayer; wherein the piezoelectric substrate and the insulation materiallayer define a hollow portion that accommodates the functional element;in a cross-sectional view in a direction perpendicular to a thicknessdirection of the piezoelectric substrate, the protective layer includes:a first portion above the hollow portion; a second portion adjacent tothe first portion at one end of the second portion; and a third portionadjacent to the second portion at another end of the second portion; adirection parallel to the first main surface is a first direction in thecross-sectional view in the direction perpendicular to the thicknessdirection of the piezoelectric substrate; and a distance between an endportion of the piezoelectric substrate in the first direction and anoutermost end portion of the protective layer in the first direction isgreater than about half of a smallest dimension, in the first direction,of a portion of the connection electrode along the side surface of theinsulation material layer.
 17. The electronic device according to claim16, wherein the insulation material layer includes a fourth portion anda fifth portion, the fourth portion facing the piezoelectric substratewith the hollow portion interposed between the fourth portion and thepiezoelectric substrate, and the fifth portion supporting the fourthportion.
 18. The electronic device according to claim 17, wherein thesecond portion is on or above the fifth portion.
 19. The electronicdevice according to claim 18, wherein a direction extending from thefirst main surface in the thickness direction of the piezoelectricsubstrate is a second direction; at an end portion of the third portionin the first direction, a closest location of the protective layer tothe piezoelectric substrate is a first location and a location separatedfrom the first location in the second direction is a second location;and a thickness of the protective layer between the first location andthe second location decreases toward the end portion of thepiezoelectric substrate.
 20. The electronic device according to claim19, wherein a location of the protective layer further separated fromthe second location in the second direction is a third location; an endportion of the second location in the first direction is located inwardsof an end portion of the first location in the first direction; and anend portion of the third location in the first direction is locatedoutwards of the end portion of the second location in the firstdirection.